ย 

Industrial Equipment

SEAbatch PV
Dosing bottle
Dosing bottle

Dosing accuracy +/- 2%

Hot Water Dry
Hot Water Dry

Perfect Drying

Transport unit
Transport unit

Fast & Stable transport unit

ํƒœ์–‘๊ด‘

Batch XL

n-type ๊ณ ํšจ์œจ ํƒœ์–‘์ „์ง€์— ์ตœ์ ํ™”๋œ ์‹œ์Šคํ…œ
Bath ์ˆ˜์ง ์žฅ๋น„ ์ค‘ ์ตœ๋Œ€ ์ƒ์‚ฐ๋Ÿ‰ (์ตœ๋Œ€ ํˆฌ์ž ํšจ์œจ)

Features & Benefits

๋‹ค์–‘ํ•œ  batch application

  - Alkaline / Acidic texturing
  - pSC1 / SC2 / O3 cleaning
  - Oxidation

์ตœ๋Œ€ ์ƒ์‚ฐ๋Ÿ‰

  - 600 wafers load 
  - up to 12,000w/h

210

Wafer ํฌ๊ธฐ

์ตœ๋Œ€ M12 (210 x 210mm)

๋†’์€ dosing ์ •ํ™•๋„

+/- 2%

์™„๋ฒฝ ๊ฑด์กฐ

Metal ์„ฑ๋ถ„ ์ œ๋กœ

Data sheet ๋‹ค์šด๋กœ๋“œ
DHF-3.png
wet process
wet process

wet process

Blower
Blower

Blower

Spray
Spray

Spray

Inline XL

n-type Inline ์‹œ์Šคํ…œ์— ์ตœ์ ํ™”๋œ ์‹œ์Šคํ…œ

Features & Benefits

Cleaning.png

๋‹ค์–‘ํ•œ Cleaning ์†”๋ฃจ์…˜

  - Roller brush / Disc brush 
  - Bubble jet
  - Ultrasonic / Plasma

Particle.png

๋ถ„์ง„ ์ œ๋กœ ์„ค๊ณ„

210

Wafer ํฌ๊ธฐ

์ตœ๋Œ€ M12 (210 x 210mm)

์™„๋ฒฝ ๊ฑด์กฐ

Inline.png

๋‹ค์–‘ํ•œ  Inline application

  - HF/Metal Cleaning
  - RCA & O3 Cleaning
  - Developing / Etching / Striping
  - Electrical deposition

Data sheet ๋‹ค์šด๋กœ๋“œ
ย 

Glass (Thin film, FPD)

SEAline Glass Cleaner

Solar Thinfilm glass์— ์ตœ์ ํ™” ๋œ ์‹œ์Šคํ…œ

๋ถ„์ง„ ์ œ๋กœ ์„ค๊ณ„

Features & Benefits

inline_white.png

๋‹ค์–‘ํ•œ inline application

  - RCA & O3 Cleaning
  - Developing / Etching

     / Striping

Cleaning_w.png

๋‹ค์–‘ํ•œ ์„ธ์ • ์†”๋ฃจ์…˜

  - Roller brush / Disc brush
  - Bubble jet
  - Ultrasonic / Plasma

G7_w.png

Glass ํฌ๊ธฐ

Generation 7

Particle_w.png

๋ถ„์ง„ ์ œ๋กœ ์„ค๊ณ„

Drying_white.png

์™„๋ฒฝ ๊ฑด์กฐ

Data sheet ๋‹ค์šด๋กœ๋“œ
Bubblejet_1
Bubblejet_1

Inline wet process

Roller brush_1
Roller brush_1

Easy maintenance

Transport_1
Transport_1

High pressure spray cleaning

๋ฐ˜๋„์ฒด

SEAbatch SEMI

Bath ์ˆ˜์ง ์žฅ๋น„ ์ค‘ ์ตœ๋Œ€ ์ƒ์‚ฐ๋Ÿ‰ (์ตœ๋Œ€ ํˆฌ์ž ํšจ์œจ)

Features & Benefits

Chemical.png

๋‹ค์–‘ํ•œ batch application

  - RCA / SPM / HFO3 / DIO3 cleaning
  - Developing / Etchiong / Stripping
  - Oxidation / Special drying

icon4.png

๋ถ„์ง„ ์ตœ์†Œํ™”

  - RCA cleaning < 30EA
  - Dry < 30EA

Batch.png

์ƒ์‚ฐ ๊ฐ€๋Šฅ ๊ธฐํŒ

  - Si wafer up to 300mm

  - Glass / Ceramics up to 500x500mm

Drying.png

์™„๋ฒฝ ๊ฑด์กฐ

icon3.png

๋†’์€ dosing ์ •ํ™•๋„ +/- 2ml

Metal ์„ฑ๋ถ„ ์ œ๋กœ

์Šค๋งˆํŠธ ๊ณต์žฅ

4์ฐจ ์‚ฐ์—… ์‹œ๋Œ€๋ฅผ ์œ„ํ•œ ๊ธฐ์ˆ 

Smart AGV

Benefits

 - ๋ฌผ๋ฅ˜ ์ž๋™ํ™” ๊ณต์žฅ & ์ตœ์ ํ™” ๋œ ์—…๋ฌด ํ๋ฆ„
- ์ž์œจ / ์•ˆ์ „ / ํ™•์žฅ / ํšจ์œจ / ์‹ ์†์„ฑ

SR7P_2.png

SR7P

SR7C_1.png
SR9_1.png

SR9

SR7C

MotorSense

Benefits

  - ์ธ๊ณต์ง€๋Šฅ(AI)๋ฅผ ํ†ตํ•œ ๊ณ ์žฅ ์˜ˆ์ธก
  - ์˜ˆ์ธก ๋ถˆ๊ฐ€๋Šฅํ•œ ์žฅ๋น„ ์ด์ƒ ์ง•ํ›„๋ฅผ ๊ฐ์ง€ ๋ฐ ์ •ํ™•ํ•œ ์˜ˆ์ธก ํ†ต๋ณด
  - ์‹ค์‹œ๊ฐ„ ๋ชจ๋‹ˆํ„ฐ๋ง ์„œ๋น„์Šค

     ** ์–ธ์ œ ์–ด๋””์„œ๋“  ์›น & ํœด๋Œ€๊ธฐ๊ธฐ๋ฅผ ํ†ตํ•œ ์ ‘์†

์ œํ’ˆ์‚ฌ์ง„_6.png
ย